High-precision chiller

Chiller generally refers to coolant circulator. In semiconductor manufacturing and inspection, high temperature environment is sometime required, so range of the temperature control has been getting wider over the years. Process temperature of semiconductor manufacturing is determined during product development, and chiller is required to provide the stable temperature. Also, the function regarding switching multiple process temperature quickly is directly linked to productivity.
Our chiller solves this conflict and has achieved small footprint by lean design, and the performance has been recognized as one of the top chiller in the world. Mirapro is one of the best chiller manufacturer in the world that makes the technology of major semiconductor manufacturers happen.

We have a various type of chillers in the lineup in order to satisfy any needs from market and customers. We ship the chillers to major semiconductor manufacturers in the world, and also we undertake manufacture and maintenance.

Mirapro chiller active in the semiconductor industry

Our chiller are able to control temperature widely from very low temperature (-70℃) to very high temperature (+145℃) in order to satisfy needs from market and customers. In addition, we have a high spec chiller, that has a function of switching high/low temperature, in our lineup. Furthermore, built-in type for semiconductor manufacturing equipment and one of the smallest compact chiller has approximately 1000 of operational experience in US semiconductor market, leading to earn a good reputation.

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