ミラプロ

Vacuum Pipe

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In the semiconductor manufacturing process with vacuum, the vacuum exhaust piping to create high level of vacuum environment and high purity gas supply line for semiconductor manufacturing process under vacuum are required.
The vacuum piping material is mainly stainless steel designed by piping engineering to optimize gas flow line among miniaturization of semiconductor manufacturing equipment and facility layout.
Mirapro is supplying standard vacuum components and manufactures vacuum piping including formed bellows and welded bellows. And Mirapro has a timely production and delivery system by internal machining and welding process to meet various customer requirements for tee, elbow, long pipe, reducer etc. which minimized pipe connection by clamping.

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ACHIVEMENT

Manufactured more than 500,000 Bellows
Manufacturing Capability for Vacuum Pipe including Welded Bellows/Formed Bellows
Ability to supply Water Cooling Jacket/ Water Cooled Double Structured Pipe

QUALITY

In-House Program for Quality and Process Improvement

WELDING

TIG Welding

WELDING

SUS304, SUS304L, SUS316, SUS316L
HASTELLOY C-22
TITANIUM(1・2)
ALUMINUM(A5000, A6000 Series)

MANUFACTURING RELATED TECHNOLOGY

CAD Designing
Infinite Element Analysis
Automated Welding System
Microscope
Testing Facility
Leak Testing

SURFACE FINISH

GBB Process
Buffing Process
Anodize Process
*Support any process possible

ミラプロ MPC

ミラプロ MPC