Vacuum
Vacuum technology is used in food production and is being applied to semiconductor manufacturing and medical technology by refinement of the technology. Mirapro’s vacuum components are an essential technology for creating precise vacuum spaces. Mirapro has contributed to production from scientific analyzer to large-scale production units with our micro precision vacuum components.
Main products
Mechanical parts for vacuum process
Welded Bellows
Vacuum process gas piping system
High Purity Gas Tube
Evacuation piping system
Coolant Piping
Piping system for cooling
Formed Bellows, Vacuum Piping, Flexible Hose, Vacuum Components
Vacuum components for science and technology
Pillow Seal, Formed Bellows with Contact Finger
Welded Bellows
Welded bellows are functional components that maintain cleanness and air tightness while being actuated in vacuum chamber.
Welded bellows are critical components that have weld zone and stress concentration zone, and are required to have durability against metal fatigue. The technology that integrates design, manufacture and evaluation in a high level are needed since evaluating properly leads to the product assurance.. Mirapro has achieved lifetime reliability in a high standard by working on stabilization of welding quality with automated YAG laser as well as the latest FEM analysis theory and metal fatigue evaluation test,. In addition, We have ensured cleanness in a high level by implementing most of the manufacturing processes in a cleanroom.
Welded bellows are critical components that have weld zone and stress concentration zone, and are required to have durability against metal fatigue. The technology that integrates design, manufacture and evaluation in a high level are needed since evaluating properly leads to the product assurance.. Mirapro has achieved lifetime reliability in a high standard by working on stabilization of welding quality with automated YAG laser as well as the latest FEM analysis theory and metal fatigue evaluation test,. In addition, We have ensured cleanness in a high level by implementing most of the manufacturing processes in a cleanroom.
Formed Bellows / Vacuum Piping / Flexible Hose / Vacuum Piping Components
Formed bellows are superior to welded bellows in inner surface polish quality and cost performance, although inferior in elasticity and durability, Therefore, formed bellows are widely used in from science and technology field including ultra-high vacuum area to general vacuum equipment. We have established our own production method, meeting wide needs, such as length and size, from a small lot. Moreover, we have contributed to construction of vacuum space by having line-up of piping components that is indispensable to installation as well as designing/manufacturing vacuum exhaust piping from vacuum equipment.
Design/production of High Purity Gas Tube
High purity gas is used for deposition in semiconductor manufacturing process, and thus high cleanliness is required for gas tube manufacturing. Mirapro has production lines that are capable of integrated production in a cleanroom, meeting a required level. In addition to that, we have distributed a number of welding engineers, and for these reasons, we are certified by domestic and foreign equipment manufacturers.
Electron Beam Welding
Mirapro has electron beam welding equipment that can generate high energy density, so we have executed stainless, aluminum and titan welding for ultra-high vacuum environment.
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